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(2 classifications) (2 resources)

Microelectromechanical systems

Classification
Power supply. (1)
United States (3)

Resources

View Resource All About MEMS

All About MEMS is a "community-oriented website devoted to the full range of information available about MicroElectroMechanical Systems." Visitors will find a wide array of background information, definitions, MEMS applications, and much more. Details on how MEMS are fabricated are provided, and recent advances in MEMS development are highlighted. A special look at the use of MEMS in wireless...

https://www.mems-exchange.org/MEMS/what-is.html
View Resource CRCnetBASE: The Mechatronics Handbook

Mechatronics is a multi-disciplinary field that has evolved considerably in the past few years, especially with recent advances in nanotechnology and microelectromechanical systems (MEMS). To make the Mechatronics Handbook reflect this fact, almost 90 people from industry and academia contributed to its creation. Published in 2002, the book "provides a unique, detailed overview of this vibrant,...

https://www.taylorfrancis.com/books/mono/10.1201/97814200424...